Fast Track Product Matrix
| CHROME |
| * Grade |
L10 |
L625 |
| C.D. (P.C.M.): |
3.0 |
2.0 |
| C.D. Tolerance (±):
|
0.5
|
0.25
|
C.D. Uniformity (±): |
0.5 |
0.25 |
Registration (±)
(layer-to-layer): |
Soda Lime |
|
0.5 |
Quartz |
0.35 |
0.3 |
Registration (±)
(die-to-grid): |
Soda Lime |
0.75 |
0.75 |
Quartz |
0.6 |
0.5 |
| Defect: |
0>5.0 |
0>5.0 |
| IRON OXIDE |
| * Grade |
L10 |
L625 |
| C.D. (P.C.M.): |
4.0 |
3.0 |
| C.D. Tolerance (±):
|
4" -6" |
0.5
|
0.5
|
7" |
No Longer Available |
No Longer Available |
C.D. Uniformity (±): |
0.5 |
0.5 |
Registration (±)
(layer-to-layer): |
Soda Lime |
0.75 |
0.75 |
Quartz |
0.5 |
0.5 |
Registration (±)
(die-to-grid): |
Soda Lime |
0.75 |
0.75 |
Quartz |
0.6 |
0.5 |
| Defect: |
0>10.0 |
0>10.0 |
* Write Tool: Please note that the Write Tool, L625, is able to achieve a better Line Edge Acuity than L10 (Line Edge Acuity = the smoothness of the line edges). It is recommended that a Product Code designated for L625 should be chosen for the data that contain circles, rings, arcs, angles, squares and/or stripes that are equal to or larger than the dimensions listed below. Please select an appropriate Product Code for your mask based on your specific mask requirements. Features that are at or near the minimum feature capabilities of the write tool may show increased edge roughness. We strongly suggest that masks with features at or near the dimensions listed below.
Restrictions:
The following Table shows the smallest dimension for Circles, Rings, Squares, Angular Lines, Stripes and/or Tapered Lines that can be resolved using a specific Write Tool (L10 or L625). Please select an appropriate Write Tool (L10 or L625) based on the Table below if your data contain any of these patterns mentioned. Additionally, our Fast Track Program does not guarantee to resolve Waveguides effectively.
|
Circles (Diameter) or Rings (Width) |
Squares |
Angular Lines |
Stripes or Tapered Lines |
Waveguides |
L10 |
5.0 microns |
_5.0 microns |
_5.0 microns |
3.0 microns |
Not Recommended |
L625 |
3.0 microns |
3.0 microns |
3.0 microns |
2.5 microns |
Not Recommended |
Please contact Fast Track Department at (310) 784-7460 or fasttrack@photo-sciences.com if you have any questions regarding specification requirements and capabilities.
CHROME MASKS
1.) L10 |
C.D.: 3.0microns ±0.5microns (No circles, rings, or squares smaller than 5.0 microns) |
|
|
|
|
|
4x4x.060 |
Chrome / Soda lime |
F10CS4060 |
$355 |
48 |
4x4x.090 |
Chrome / Soda lime |
F10CS4090 |
$355 |
48 |
5x5x.060 |
Chrome / Soda Lime |
F10CS5060 |
$380 |
48 |
5x5x.090 |
Chrome / Soda Lime |
F10CS5090 |
$380 |
48 |
6x6x.090 |
Chrome / Soda Lime |
F10CS6090 |
$500 |
48 |
6x6x.120 |
Chrome / Soda Lime |
F10CS6120 |
$525 |
48 |
7x7x.090 |
Chrome / Soda Lime |
F10CQ7090 |
$825 |
72 |
7x7x.120 |
Chrome / Soda Lime |
F10CS7120 |
$825 |
72 |
4x4x.060 |
Chrome / Quartz |
F10CQ4060 |
$455 |
48 |
4x4x.090 |
Chrome / Quartz |
F10CQ4090 |
$455 |
48 |
5x5x.090 |
Chrome / Quartz |
F10CQ5090 |
$590 |
48 |
6x6x.090 |
Chrome / Quartz |
F10CQ6090 |
$815 |
48 |
6x6x.120 |
Chrome / Quartz |
F10CQ6120 |
$840 |
48 |
7x7x.150 |
Chrome / Quartz |
F10CQ7150 |
$1650 |
72 |
1.) L625 |
C.D.: 2.5microns ±.25microns (No circles, rings, or squares smaller than 5.0 microns) |
Size (inches) |
Material / Substrate |
Product Code |
Price |
Ready to Ship in (hrs) |
4x4x.060 |
Chrome / Soda lime |
F62CS4060 |
$445 |
48 |
4x4x.090 |
Chrome/Soda Lime |
F62CS4090 |
$455 |
48 |
5x5x.060 |
Chrome / Soda Lime |
F62CS5060 |
$535 |
48 |
5x5x.090 |
Chrome / Soda Lime |
F62CS5090 |
$535 |
48 |
6x6x.090 |
Chrome / Soda Lime |
F62CS6090 |
$750 |
48 |
6x6x.120 |
Chrome / Soda Lime |
F62CS6120 |
$775 |
48 |
7x7x.090 |
Chrome / Soda Lime |
F62CS7090 |
$1050 |
72 |
7x7x.120 |
Chrome / Soda Lime |
F62CS7120 |
$1050 |
72 |
4x4x.060 |
Chrome / Quartz |
F62CQ4060 |
$525 |
48 |
4x4x.090 |
Chrome / Quartz |
F62CQ4090 |
$525 |
48 |
5x5x.090 |
Chrome / Quartz |
F62CQ5090 |
$685 |
48 |
6x6x.090 |
Chrome / Quartz |
F62CQ6090 |
$885 |
48 |
6x6x.120 |
Chrome / Quartz |
F62CQ6120 |
$910 |
48 |
7x7x.150 |
Chrome / Quartz |
F62CQ7150 |
$1850 |
72 |
IRON OXIDE MASKS
1.) L10 |
C.D.: 4.0microns ±0.5microns (4”-6”) ±0.75microns (7”) (No circles, rings, or squares smaller than 5.0 microns) |
Size (inches) |
Material / Substrate |
Product Code |
Price |
Ready to Ship in (hrs) |
4x4x.060 |
Iron Oxide/Soda Lime |
F10IS4060 |
$510 |
72 |
4x4x.090 |
Iron Oxide/Soda Lime |
F10IS4090 |
$510 |
72 |
5x5x.090 |
Iron Oxide/Soda Lime |
F10IS5090 |
$575 |
72 |
6x6x.090 |
Iron Oxide/Soda Lime |
F10IS6090 |
$740 |
72 |
4x4x.060 |
Iron Oxide/Quartz |
F10IQ4060 |
$640 |
72 |
4x4x.090 |
Iron Oxide/Quartz |
F10IQ4090 |
$640 |
72 |
5x5x.090 |
Iron Oxide/Quartz |
F10IQ5090 |
$810 |
72 |
6x6x.120 |
Iron Oxide/Quartz |
F10IQ6120 |
$1250 |
72 |
1.) L625 |
C.D.: 2.5microns ±.25microns (4”-7”) (No circles, rings, or squares smaller than 3.0microns) |
Size (inches) |
Material / Substrate |
Product Code |
Price |
Ready to Ship in (hrs) |
4x4x.060 |
Iron Oxide/Soda Lime |
F62IS4060 |
$590 |
72 |
4x4x.090 |
Iron Oxide/Soda Lime |
F62IS4090 |
$590 |
72 |
5x5x.090 |
Iron Oxide/Soda Lime |
F62IS5090 |
$765 |
72 |
6x6x.090 |
Iron Oxide/Soda Lime |
F62IS6090 |
$975 |
72 |
4x4x.060 |
Iron Oxide / Quartz |
F62IQ4060 |
$800 |
72 |
4x4x.090 |
Iron Oxide / Quartz |
F62IQ4090 |
$800 |
72 |
5x5x.090 |
Iron Oxide / Quartz |
F62IQ5090 |
$940 |
72 |
6x6x.120 |
Iron Oxide / Quartz |
F62IQ6120 |
$1450 |
72 |
Note: We no longer offer 7”X7”X.090” Iron Oxide Soda Lime Masks under our Fast Track Program.
Mask:
-
1X Chrome or Iron Oxide Master (4” to 7”) ready to ship in the turn time listed below after the data is fracture-ready.
-
The guaranteed delivery might be temporarily suspended when the capacity becomes full. Customer will be notified at the time his or her order is placed. The cut-off time for sending in new orders, including data, is 3:00 PM PST. Orders received after 3:00 PM will count as being received the following business day.
- PSI will add a P.C.M. (Process Control Monitor) and measure it as C.D.
-
If a customer requires that PSI measure specific C.D. (up to 5 locations), he or she must supply a plot of these C.D. locations and/or X,Y coordinate values.
-
C.D. features should not be circles, curved or angular features, or larger than 20 microns; however, if a customer requires PSI to measure them, these measurements will be based on best effort only.
Data Qualification:
All NEW customers are required to go through the Fast Track Data Qualification process. The first-time qualification is free of charge.
Fast Track CAD engineer previews the data. If the data is qualified, we will proceed with the order and the customer will receive order confirmation with the delivery information. If the data has issues, PSI Account Manager or Product Manager will contact the customer with the brief summary of data issues. Customer will then have the option of repairing the data themselves or have PSI repair the data.
GDS, DXF, or PG data is the only accepted data format for Fast Track Products.
The (0,0) of supplied data should be in either one of two locations (same as 0,0 of the photomask).
The area within 0.250” (6.35mm) from the edge of the plate is reserved for PSI’s P.C.M. and Serialization; therefore, the mask’s active data area (including text) should be contained within the remaining area.
Maximum number of features in a data file is 25 Million.
Maximum data file byte size is 150 MB.
File Name (for all data formats) as well as Top Structure Name (only for GDSII) should not contain any space(s) between characters or invalid characters.
PSI requires the fresh data for new or repeat orders.
Customer must supply data and specifications necessary to build masks.
| Description |
Product Code |
Price |
Data Repair, Plot & Prep by Digidat |
CADO |
$125 / hr |
Inspection:
- Visual inspection and defect repair only for all Fast Track masks.
- Metrology tools are calibrated with relevant traceable standards.
- Iron Oxide features will be measured on tools calibrated with Chrome standard artifacts.
Write Tool:
Heidelberg DWL 200/400 (LPG: Laser Pattern Generator)
All purchase contracts for Photo Sciences products are governed by Photo Sciences General Terms and Conditions.
Photo-Sciences' 48/72 hour shipping guarantee is limited by acts of God or other acts beyond the control of Photo-Sciences. In the event of acts of God or other acts beyond the control of Photo-Sciences, Photo-Sciences shall not be bound by the 48/72 hour shipping guarantee. It is within the sole discretion of Photo-Sciences to suspend the 48/72 hour guarantee at any time.