Mask:
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1X Chrome and Iron Oxide Master (4" to 7"), for which required specifications are not within Fast Track program parameters.
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Chrome and Iron Oxide Master (4" to 7"), for which required specifications are not within Fast Track program parameters.
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Chrome and Iron Oxide Reprints (4" to 7").
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Automatic measurements and defect inspection performed upon request.
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PSI will add a P.C.M. (Process Control Monitor) and measure it as C.D. (Critical Dimension) when a customer does not specify his or her C.D. or X,Y coordinate values. PSI will manually measure up to 5 C.D. locations at no additional cost.
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C.D. features should not be circles, curved or angular features, or larger than 20 microns; however, if a Customer requires PSI to measure them, these measurements will be based on best effort only.
Data:
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GDS, DXF, DWG, BMP, CIF, PG and other drawing formats are acceptable for Sure Track Products. (Other data formats may be acceptable. Please ask your PSI representative.)
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Digitizing, conversion and other data editing services are available.
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Plots or Data can be provided for Customer's approval.
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Data center (0,0) must match plate center.
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The immediate area within 0.250" (6.35mm) from the edge of the plate is reserved for PSI's P.C.M. and Serialization; therefore, the mask's active data area (including text) should be contained within the remaining area.
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File Name (for all data formats) as well as Top Structure Name (only for GDSII) should not contain any space(s) between characters or invalid characters.
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Customers must supply data or drawing(s) and specifications necessary to build masks.
Inspecton:
- All measurements, inspection and defect repair will be visual unless automatic measurements or inspection is requested.
- Automatic measurements and inspection are available at additional cost.
- Visual measurements, inspection and repair only for Chrome Reprints and Iron Oxide Masters/ Reprints.
- Metrology tools are calibrated with relevant traceable standards.
- Iron Oxide features will be measured on tools calibrated with Chrome standard artifacts.
Delivery:
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Masters = Ready to ship in 5 to 7 business days after the receipt of order or approval, depending on the capacity.
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Reprints = Add 2 days for 2 copies per layer or 10 copies per order, whichever happens first. Add another 2 days for the next 2 copies per layer or 10 copies per order.
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Digitizing = 24 to 48 hours after receipt of order. Data Conversion = 24 hours after receipt of order.
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Automatic Measurements/Inspection = Based on the type of measurements or inspection required.
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Cutting = Add 2 days.
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Pellicles = Based on the availability of pellicle(s).
Write Tool:
- Heidelberg DWL 200/400 (LPG: Laser Pattern Generator)
FastTrack+ Product Matrix
(Units in Microns)
For smaller features and tolerances may be available.
Please contact Photo Sciences for more information.
| CHROME |
| Specifications |
Master |
Reprint |
| C.D.: |
<=0.7 um |
2.0 min. |
| C.D. Tolerance (±):
|
0.05 um |
2X Master (0.5 min.) |
C.D. Uniformity (±): |
0.25 um |
2X Master (0.5 min.) |
Registration (±)
(layer-to-layer): |
Soda Lime |
0.50 um |
2X Master (0.5 min.) |
Quartz |
0.25 um |
2X Master (0.5 min.) |
Registration (±)
(die-to-grid): |
Soda Lime |
0.50 um |
2X Master (1.0 min.) |
Quartz |
0.10 um |
2X Master (0.5 min.) |
| Defect: |
* 0>5.0, 0>3.0, 0>2.0, 0>1.5, 0>1.0 um |
* 0>5.0 |
IRON OXIDE |
Specifications |
Master |
Reprint |
C.D.: |
|
3.0 min. |
C.D. Tolerance (±):
|
4" - 6" |
>= 0.35 um |
2X Chrome Master (0.75 min.) |
7" |
>= 0.5 um |
Not Available |
C.D. Uniformity (±): |
4" - 6" |
>= 0.35 um |
2X Chrome Master (0.75 min.)
|
7" |
>= 0.5 um |
Not Available |
Registration (±)
(layer-to-layer): |
Soda Lime |
>= 0.5 um |
2X Chrome Master (0.75 min.) |
Quartz |
>= 0.35 um |
2X Chrome Master (1.0 min.) |
Registration (±)
(die-to-grid): |
Soda Lime |
>= 0.75 um |
2X Chrome Master (0.75 min.) |
Quartz |
>= 0.4 um |
2X Chrome Master (1.0 min.) |
|
* 0>10.0 um |
* 0>10.0 |
* Visual Inspection and Repair Only for these Defects.
