Photomask Inspection

2018-08-30T18:15:27+00:00

A hard defect is any flaw affecting the photomask mask, other than contamination. One class of defects includes ...

Photomask Inspection2018-08-30T18:15:27+00:00

Parts of a Photomask

2018-08-14T14:56:11+00:00

A die is a single complete device image. A primary die (also called the primary pattern) contains the device design that is used ...

Parts of a Photomask2018-08-14T14:56:11+00:00

Photomask Writing

2018-07-17T14:38:08+00:00

The writing equipment writes the geometry onto the blank mask plate by exposing the photo resist to a UV light source, a laser or an electron beam ...

Photomask Writing2018-07-17T14:38:08+00:00

Photomask Quality

2018-05-31T17:35:30+00:00

Photomasks must be of the highest quality and must meet a wide variety of customer specifications. The photomask quality requirements are usually ...

Photomask Quality2018-05-31T17:35:30+00:00

Binary & Phase Shift Masks

2018-05-31T17:38:56+00:00

Photomasks can be separated into two main categories; conventional binary masks and advanced phase-shift masks. A binary mask consists of a ...

Binary & Phase Shift Masks2018-05-31T17:38:56+00:00

Photomask Tone

2018-06-15T15:12:50+00:00

Various terminologies are used to describe the tone of both pattern and background areas of a photomask.

Photomask Tone2018-06-15T15:12:50+00:00